Domestic Equipment Suppliers in China Seek Both Semiconductor and Solar Industry

Domestic Equipment Suppliers in China Seek Both Semiconductor and Solar Industry Growth

by Lily Feng and Dan Tracy, SEMI Industry Research & Statistics

About 80 domestic companies (including joint ventures) in China are devoted to semiconductor equipment research and manufacturing. Many of these domestic equipment manufacturers are research institutes rooted in and/or transformed from military industrial entities with sales limited to colleges and research institutions. With the emergence of the semiconductor industry, however, a strong and viable equipment industry in China is desired to support and supply the fabs based there.

Domestic companies play a role in this and a number of them have a prominent position in the local equipment manufacturing market. As the table below shows, domestic companies are active in many product segments of the semiconductor equipment market. Programs and initiatives are in place to encourage investment and development of domestically manufactured equipment, and as a result, some local Chinese equipment vendors have developed or are developing both 200 mm and 300 mm tools. Collaboration among fabs and domestic equipment companies also has quietly taken shape to co-develop the critical process tools and process recipes for 0.25 μm-0.18 μm process technologies. In certain cases, collaboration exists down to 45 nm process technologies.

Product Segments

Company*

Exposure & Write Equipment

SMEE

CECT 45

CECT 48

 

Photoresist Processing Equipment

SevenStar

SIAYUAN

 

 

Etch Equipment

AMEC

NMC

Sevenstar

CETC 48

Surface Conditioning Equipment

SevenStar

CETC 45

SIAYUAN

 

Thermal Process Equipment

SevenStar

CETC 48

 

 

Ion Implant Equipment

ZKX

CETC 48

 

 

Thin Film Deposition Equipment

AMEC

NMC

Hiway

SKY

(CVD/Sputter/Electroplating/electro deposition)

Inspection & Measurement Equipment

2 Start-ups

 

 

 

CMP Equipment

CETC 48

CETC 45 

ACM

 

Wafer Manufacturing

LZR

XAUT

JYT 

JingYi

* ACM: ACM Research, Inc.; AMEC: Advanced Micro-Fabrication Equipment, Inc.; CECT: China Electronics Technology Group Corporations (various companies rooted in research institutes); Hiway: Hiway Systems International, Inc.; JingYi: Beijing JingYi Century Automatic Equipment Co. Ltd.; JYT: BeiJing JingYunTong Vacuum Equipment Co. Ltd.; LZR: LanZhou Rapid Equipment Manufacturing Co. Ltd.; NMC: North Microelectronics, Inc.; SevenStar: Beijing SevenStar HuaChuang Electronics Co. Ltd; SIAYUAN: Shen Yang SIA YUAN; SKY: SKY Technology Development Co. Ltd; SMEE: Shanghai Micro Electronics Equipment Co. Ltd.; XAUT: Xi’an University of Technology Crystal Growing Research Institution ; ZKX: BeiJing ZhongKeXin Electronics Equipment Co. Ltd.

Compared to overseas competitors, these companies are smaller in terms of overall revenues, though revenue has been growing steadily over the past several years (Chart below). Growing investments in solar cell and module manufacturing in China are key revenue growth drivers for the domestic companies in China. (Sales into LED and other markets account for the difference between the Total Sales versus combined semiconductor equipment plus solar equipment sales in the chart).


Domestic equipment companies are increasing their capabilities to support the semiconductor, solar, and other related industries. Domestically developed tools are in the evaluation stage and are beginning to be used in volume production by local fabs for 200 mm and 300 mm production. Solar wafer, cell, and module makers have turned to Chinese companies for equipment too. Manufacturing of equipment in China will evolve over the next several years as the local supply chain for parts and subsystems develops its technology.

If you are interested in additional information on the market in China, SEMI has the following reports available: 2008 China Semiconductor Wafer Fab and Foundry Outlook, China Domestic Fab Equipment Suppliers, and China Equipment Subsystems, Components, and Parts Vendors Overview. Fabs in China are also covered in the research SEMI reports in its Fab Database Reports such as World Fab Forecast and World Fab Watch.

Please visit this store at www.semi.org/marketinfo for information.

For other questions, please contact either Lily Feng at lifeng@semi.org or Dan Tracy at dtracy@semi.org.