SEMI Announces Nine New Technical Standards
Documents Include Specification for High Purity Water for PV Processing
SAN JOSE, Calif. – February 25, 2010 – SEMI has published nine new technical standards applicable to the semiconductor, MEMS, FPD and photovoltaic (PV) manufacturing industry. The new standards, developed by technical experts from equipment and materials suppliers, device manufacturers and other companies participating in the SEMI International Standards Program, are available through the SEMIViews Standards product, available at: www.semi.org/semiviews.
The new standards, part of the March 2010 publication cycle, join more than 780 standards that have been published by SEMI during the past 36 years.
The new standards include a test method for specifying high-purity water (HPW) for photovoltaic manufacturing. This standard can also help to define operational specifications for the plant and an excursion management program. This is the first and only known standard for HPW in the photovoltaic area.
“The photovoltaic industry has had nowhere to go for industry-wide high-purity water specifications until now,” said James Amano, Director, SEMI International Standards. “This is the third PV standard SEMI has released in the last year, and it will contribute to improved yield and ensure compatibility of equipment and processes worldwide.”
The list of new SEMI Standards being released includes:
SEMI D55 — Guide for Evaluation Method of Color Performance for Color Filter Assemblies (Evaluation Method of Color Purity)
SEMI D56 — Measurement Method for Ambient Contrast of Liquid Crystal Displays
SEMI D57 — Definition Measurement Index (VCT) for Mura in FPD Image Quality Inspection
SEMI D58 — Terminology and Test Pattern for the Color Breakup of Field Sequential Color Display
SEMI E154 — Mechanical Interface Specification for 450 mm Load Port
SEMI E155 — Specification for Sensor Actuator Network for Motionnet® Communication
SEMI F108 — Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications
SEMI PV3 — Guide for High Purity Water Used in Photovoltaic Cell Processing
SEMI S27 — Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports
In addition to the nine new standards, a complete rewrite of SEMI S7 was released. This is a qualification for the safety evaluation of semiconductor processing equipment which generally occurs before it arrives at the customer site.
The SEMI Standards Program, established in 1973, covers all aspects of semiconductor process equipment and materials, from wafer manufacturing to test, assembly and packaging, in addition to the manufacture of flat panel displays, photovoltaic systems and micro-electromechanical systems (MEMS). More than 2,600 volunteers worldwide participate in the program, which is made up of 19 global technical committees. Visit www.semi.org/standards for further details about SEMI Standards.
SEMI is the global industry association serving the manufacturing supply chains for the microelectronic, display and photovoltaic industries. SEMI member companies are the engine of the future, enabling smarter, faster and more economical products that improve our lives. Since 1970, SEMI has been committed to helping members grow more profitably, create new markets and meet common industry challenges. SEMI maintains offices in Austin, Beijing, Bengaluru, Berlin, Brussels, Grenoble, Hsinchu, Moscow, San Jose, Seoul, Shanghai, Singapore, Tokyo, and Washington, D.C. For more information, visit www.semi.org
Editor’s Note: Following is detailed information about several of the new SEMI standards.
SEMI D56: The contrasts of LCDs are sensitive to the lighting conditions and viewing angles. This standard can be applied for measurements of LCDs in ambient lighting conditions and/or at different viewing angles which are not considered in the existing standards. It can also distinguish the contrast of LCDs with different surface treatment which is difficult to be distinguished by using the traditional measurement method.
Customers usually use LCDs in the bright environment, such as office, living rooms, and so on. In most existing standards, only measurement methods for dark room contrast are considered. To evaluate the contrast of display devices under ambient light is more practical than in the dark environment. This standard can give manufacturers a better understanding of their products’ performance characteristics in actual use.
SEMI E154: By standardizing the interface dimensions for the 450 mm FOUP and load port in a set of standards, SEMI reduces the need for suppliers to communicate design intent across the supplier community thus improving product interoperability. This allows for suppliers to focus on product design and verification and reduces the cost and time for a customer to qualify a product.
As the semiconductor industry transitions to 450 mm, the development of carrier interface standards requires global cooperation. By standardizing the interface dimensions of the loadport, SEMI E154 signifies faster product qualification which will lead to better factory integration and lower cost of ownership.
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