HORST REICHARDT RECEIVES EUROPEAN SEMI AWARD FOR 2005
SEMI Honors Pioneer in Waste Gas Abatement Technology
Munich, Germany, 12 April 2005 – Horst Reichardt, a pioneer in waste gas abatement technology for the semiconductor industry, was honored with the European SEMI Award for 2005. The award was presented during a reception at the SEMICON Europa 2005 exposition here last night.
"Dr. Reichhardt really introduced the idea of point-of-use abatement. Today, this technology is used by most device makers around the world to ensure a high level of safety in the fab environment,” said Walter Roessger, president of SEMI Europe.
The technology is based on a combination of flame combustion and wet scrubbing to ensure safe and economical abatement of all kind of waste gases, including PFCs. The technology operates with all brands of vacuum pumps and state-of-the-art process equipments.
Reichardt, who holds 15 patents, has worked in the semiconductor industry in Dresden, Germany, since 1976. At the Center for Microelectronics, he led a research group charged with developing systems and processes for thin-film technologies using physical vapor deposition processes. Reichardt and his team successfully developed technologies for MOS applications in 256-kb DRAM, 1-Mb DRAM and 4-Mb DRAM generations.
In 1991, Reichardt co-founded DAS GmbH, where he currently serves as president, responsible for sales, service and marketing. He completed physics studies at the Technical University of Dresden in 1975 and received a degree from the Technical University of Chemnitz in 1989.
DAS GmbH, based in Dresden, Germany, employes 80 people worldwide and focuses on developing and manufacturing point-of-use (POU) waste gas abatement technologies and equipment. The company has more than 1,300 installed systems among its 75 semiconductor and other high-tech related customers.
SEMI is a global industry association for companies participating in the microelectronics and display industries. SEMI maintains offices in Austin, Beijing, Brussels, Hsinchu, Moscow, San Jose (Calif.), Seoul, Singapore, Tokyo, Shanghai and Washington, D.C. For more information, visit SEMI at www.semi.org.
Vincent Dubois/SEMI Europe