SEMI Publishes Six new Technical Standards


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SEMI Publishes Six new Technical Standards

Documents Include Guidelines for FPD Manufacturing, SOI Wafers

SAN JOSE, Calif. – June 11, 2007 – SEMI has published six new technical standards applicable to the semiconductor, flat panel display (FPD) and MEMS manufacturing industries. The new standards, developed by technical experts from equipment and materials suppliers, device manufacturers and other companies participating in the SEMI International Standards Program, are available for purchase in CD-ROM format or can be downloaded from the SEMI website, www.semi.org.

SEMI Standards are published three times a year. The new standards, part of the June 2007 publication cycle, join more than 740 standards that have been published by SEMI during the past 34 years.

“These new SEMI standards, which include specifications for the flat panel display (FPD) manufacturing industry, are the result of collaborative, consensus-driven efforts among industry experts -- competitors and customers alike -- to manage the ever increasing manufacturing challenges, improve yield and ensure compatibility of equipment and processes worldwide,” said Bettina Weiss, SEMI director of International Standards.

The standards released today include specifications for bar code container identification, specifications for silicon-on-insular (SOI) wafers, and a test method for surface hardness of FPD polarizing film. In addition to the six new standards, SEMI revised a previously published standard on EHS guidelines for exhaust ventilation of semiconductor manufacturing equipment. The revised SEMI S6 offers significantly more detailed guidance and provides equipment suppliers, evaluators and users a means of validating the adequacy of exhaust ventilation.

The new standards released today include:

SEMI C61
Specification for Bar-Code Container Identification

SEMI D49
Specification of Single Substrate Orientation for Loading/Unloading Into/From Equipment to Specify ID Reader Position

SEMI D50
Test Method for Surface Hardness of FPD Polarizing Film

SEMI E148
Specification for the Definition of Time Synchronization Method and Format

SEMI E149
Guide for Documentation Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment

SEMI M71
Specification for Silicon-On-Insulator (SOI) Wafers for CMOS LSI 130 nm Technology Generation and Beyond

The SEMI Standards Program, established in 1973, covers all aspects of semiconductor process equipment and materials, from wafer manufacturing to test, assembly and packaging, in addition to the manufacture of flat panel displays and micro-electromechanical systems (MEMS). About 1,100 volunteers worldwide participate in the program, which is made up of 17 global technical committees. Visit www.semi.org/standards for further details about SEMI Standards.

SEMI is a global industry association serving companies that provide equipment, materials and services used to manufacture semiconductors, displays, nano-scaled structures, micro-electromechanical systems (MEMS) and related technologies. SEMI maintains offices in Austin, Beijing, Brussels, Hsinchu, Moscow, San Jose (Calif.), Seoul, Shanghai, Singapore, Tokyo and Washington, D.C. For more information, visit www.semi.org.

Association Contacts

Bettina Weiss/SEMI
Tel: 1.408.943.6998
E-mail: bweiss@semi.org

Scott Smith/SEMI
Tel: 1.408.943.7957
E-mail: smith@semi.org

(Editor's Note: Following is more detailed information about the new SEMI standards).

SEMI C61
Specification for Bar-Code Container Identification

SEMI C61 applies to warehousing/manufacturing processes where packaged chemicals or isotainer (bulk) chemicals are being handled and where empty returnable containers need to be tracked.

Device makers are confronted with supplier specific bar-code identification techniques on chemical containers, which complicates the development and usage of automated tracking and control applications at the manufacturing site. On the other hand, suppliers are being asked by device makers to develop customer specific bar-code container identification solutions that also complicate the product labeling process and generally increases inventory costs.

Customers that have not yet agreed to a specific identification standard with suppliers are confronted with a multitude of identification techniques (one per supplier), complicating the development and usage of automated chemical controls in their warehouse and manufacturing processes.

This standard will allow device makers to build automated control applications that are independent of the supplier. The benefits of this approach include faster design, development and implementation and lower software development costs.

For suppliers, the standard will allow them to bar-code their products independently of where the product eventually will be shipped to. This means their product labeling process becomes simpler which is translated into lower software development and maintenance costs.

In addition, the data elements in this identification standard could be used as a basis for developing a standard in support of future RFID technology based applications.

SEMI D49
Specification of Single Substrate Orientation for Loading/Unloading Into/From Equipment to Specify ID Reader Position

SEMI D49 is used in FPD manufacturing. It clarifies the reading position of the substrate ID during the load/unload between the AMHS and equipment, by specifying the orientation of the single substrate against the equipment opening.

Application of this standard improves the communications among panel makers, equipment suppliers, and AMHS manufacturers and subsequently reduces the time taken for on-site installation and adjustment of the reader. In addition, standardizing ID reading positions increases the ID reading accuracy, which is an essential element for traceability.

SEMI D50
Test Method for Surface Hardness of FPD Polarizing Film

The ISO standard 15184 for determining the hardness of coating films has been adopted for measuring the surface hardness of a FPD polarizing film and its materials. SEMI D50 clarifies the differences when evaluating a polarizing film and its materials, especially the load in the test method and evaluation items in the evaluation method.

It defines the procedural guideline for measuring the surface hardness of a polarizing film and its materials for FPD production. These procedures are applicable to manufacturing, quality control, and development work.

SEMI E148
Specification for the Definition of Time Synchronization Method and Format

SEMI E148 solves the time synchronization and time stamping issue with equipment data quality and the problem of being able to accurately collect time based data. Accurate timestamps reduce the time needed to study and to correlate events to solve process problems. By synchronizing the equipment and applications during the manufacturing process, users can correlate data from multiple sources in the factory and take action in a timely and confident manner.

In the near future SEMI E148 promises to raise the quality of the data stored by the manufacturing systems and enable more automated decision making tools. This standard enables the merging of manufacturing data from multiple sources to provide a broader understanding of what is actually occurring on the manufacturing floor.

SEMI E149
Guide for Documentation Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment

SEMI E149 applies to the purchase of semiconductor or FPD manufacturing equipment. Prior to this document, no single SEMI standard defined all of the content and related requirements (such as operation, maintenance, and installation manuals) provided by the equipment supplier. However, some SEMI standards do cover equipment documentation content requirements for a few areas, such as SEMI E6 for installation manuals and SEMI S13 for EHS-related documentation.

The E149 standard will save negotiating time for purchasers and equipment suppliers by providing minimum documentation requirements. It will also support more effective equipment negotiations and purchase agreements between the equipment supplier and purchaser/user.

The benefit of complete documentation is that is improves the purchaser's ability to install, use, maintain, and repair the equipment resulting in increased productivity, lower costs and improved safety.

SEMI M71
Specification for Silicon-On-Insulator (SOI) Wafers for CMOS LSI 130 nm Technology Generation and Beyond

SEMI M71 relates to the selection and purchase of SOI wafers for VLSI applications. It simplifies the process of purchasing SOI wafers by clarifying communication between the wafer suppliers and their customers and helps in preventing confusion and misunderstanding that might lead to incorrect specifications and to purchasing of wafers that are not suitable for the planned application.

Since the standard improves communication between both parties, it reduces the costs associated with the sales transactions. The vendors will be better informed as to which parameters need to be specified and the most efficient method of describing their products. The customers will receive a better understanding of how to select the wafers they require.

SEMI S6
EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

SEMI S6 is directly related to the exhaust ventilation aspects of semiconductor manufacturing equipment, but can be applied to FPD and MEMS manufacturing environments.

Although this is a revision of an existing SEMI standard, it provides significantly more detailed guidance and addresses issues related to design and performance criteria, validation, and reporting. It includes appendices containing test methods and several related information sections, such as general design recommendations.

By providing performance, design and validation criteria that are commonly accepted by equipment suppliers, evaluators and users, SEMI S6 should reduce design costs for “off the shelf” equipment. It should also reduce the number of safety related “customer special” design requirements.

Semiconductor manufacturing equipment relies heavily on exhaust ventilation to maintain a safe working environment. However, previously there were no industry consensus standards or design guides that specifically address this type of equipment. The revised SEMI S6 fills this gap and provides equipment suppliers, evaluators and users a means of validating the adequacy of exhaust ventilation.