Global MEMS / NEMS Committee

To develop standards for MEMS & NEMS devices that cannot be handled by existing technical committees. Current topics include Wafer Bonding Alignment Targets; Step-Height Measurements of Thin, Reflecting Films using an Optical Interferometer; and Ultra High Purity Microscale Fluidic Systems for Use in Scalable Process Environments.

For more information, contact SEMI Standards at standards@semi.org.

Global MEMS / NEMS Committee Activities

Upcoming SEMI Standards Meetings:

• July 8, 2013.  SEMICON West Standards Meetings
• View SEMI Standards Calendar of Events

Interested in Participating?

SEMI Standards Program Membership is required to participate. Registration is free and quick. Join Now!

SEMI MEMS / NEMS Standards

Search for published MEMS / NEMS (click on the "MEMS" volume)

Quick Links:

• Document Status Report
• New Activity Report Forms (SNARFs) and Task Force Organization Forms (TFOFs)
• Committee Meeting Minutes
• Committee Express Reports

Balloting Information

• Critical Dates for Ballots – Submission Deadlines and Voting Period
• Vote on Ballots

Contact Us

• SEMI Staff Contacts