The SEMI Standards team hit the ground running in 2026, starting this year with an important milestone to our Flexible Hybrid Electronics (FHE) standardization efforts. As FHE technology continues to evolve into a scalable and manufacturable class of systems, we’re excited to share the upcoming release of SEMI 7242, Guide for Reliability of Flexible Hybrid Electronics. This is the first time a comprehensive framework for reliability assurance in FHE systems has been created, closing a critical gap within the industry landscape. Published as SEMI FH5, the standard is now available online via the SEMI Store or through a SEMIViews license.
We’d also like to highlight a pending revision for SEMI E142, Specification for Substrate Mapping. While SEMI E142 is currently designed to work with other SEMI data exchange Standards, SEMI Draft Document 7381 proposes a subordinate standard to define maps to and from non-E142 wafer coordinate systems. Meanwhile, the Information & Control Japan Technical Committee (TC) announced its new Maintenance Robot Communication (MRC) Task Force for standardizing communications for robotic maintenance systems to improve production efficiency and workloads in fabs.
This quarter also included key developments from both SEMICON Korea and SEMICON China. At SEMICON Korea, members of the Semiconductor Manufacturing Cybersecurity Consortium (SMCC) discussed a unified, standards-based approach for strengthening cybersecurity amidst evolving digital threats. A month later, SEMICON China served as the backdrop for the EHS TC Chapter Formation Group Meeting, where attendees discussed critical safety, material usage, and energy efficiency standards. The North America (NA) Winter Meetings, held virtually in February 2026, also brought several TCs together to revise standards for MEMS, advanced packaging, EH&S, Facilities, Gases & Liquid Chemicals, factory automation, and more.
For more than 50 years, the SEMI Standards International Program has worked to advance manufacturing processes, lower costs, and support key industry growth markets. To get involved in future developments, become a member of the SEMI Standards Program. Membership is free.
With so much underway in Q1, we look forward to an incredible year ahead.
Q1 2026 Highlights
A New Standard for Flexible Hybrid Electronics
As the first consensus-driven framework for reliability assurance in FHE systems, SEMI 7242, Guide for Reliability of Flexible Hybrid Electronics, was created to ease roadblocks for transitioning and commercializing FHEs. It aims to speed design cycles, improve comparability of test results, reduce the risk of integrating FHE into operations, and instill confidence for scaling FHEs from prototypes to high-volume production. Document 7242 was drafted by the FHE Reliability and Testing Task Force, with added participation from industry, academia, and government laboratories.
The elevation of Document 7242 to a formal SEMI Standard reflects the field’s progression to a stage where consistent approaches to reliability are both feasible and necessary. As FHE adoption grows across medical, industrial, consumer, and defense applications, Document 7242 will support systems that offer dependable performance and sustained durability over time. Document 7242 also joins the recently published SEMI FH6 Standard on FHE Terminology.
Revisions to SEMI E142
SEMI E142, Specification for Substrate Mapping, defines data items required for reporting, storing, and transmitting map data for substrates. It was developed to work alongside other SEMI Standards to exchange data through a SECS/GEM interface.
Identifying failure points requires a two-dimensional XY coordinate map generated for substrates. However, because some steps in the semiconductor manufacturing process may use their own XY coordinate systems, a revision is currently needed to define an infrastructure for mapping a non-E142 wafer XY coordinate system to and from the E142 Standard XY coordinate system.
The Advanced Backend Factory Integration (ABFI) Task Force will ballot this potential subordinate standard from August 19 to September 18. It will be adjudicated during SEMICON West from October 13-15, 2026 in San Francisco, California.
Introducing the Maintenance Robot Communication Task Force
As the industry moves toward smart manufacturing, integrating robot-based maintenance solutions is becoming increasingly important for enhancing production efficiency, reducing workload, and ensuring consistent work quality in automated environments. The Maintenance Robot Communication TF was formed to address the critical need to standardize operational communications for robotic maintenance systems.
A dedicated community page is now available on the Connect@SEMI platform for members to exchange ideas.
This activity joins the recently established Mobile Maintenance Robot Safety Task Force which aims to develop new safety guidelines that are deemed necessary to fill the gaps between existing industry standards including SEMI Safety Guidelines with regard to safe operation of mobile maintenance robots.
Standards Activities from Europe Spring Meeting
The Compound Semiconductor Materials Europe TC Chapter held its annual virtual Spring Meeting on April 14, 2026. The meeting drew robust participation from China, Japan, Europe, North America, and other regions. The TC Chapter successfully adjudicated document 7111, Revision of SEMI M81-0418, Guide for Defects Found in Monocrystalline Silicon Carbide Substrates. The major update provides significant guidance on defects in silicon carbide substrates. This document has been forwarded to SEMI Publications for final processing. The Europe TC Chapter will reconvene November 10–13, 2026, during SEMICON Europa in Munich, Germany.
Underscoring the Need for Cybersecurity Standards at SEMICON Korea
SEMICON Korea featured more than 200 speakers who shared insights and presented solutions that are shaping the modern AI era. From February 11-13 in Seoul, the conference also served as a meeting point for the next generation of SEMI Standards. Most notably, leaders from the Semiconductor Manufacturing Cybersecurity Consortium (SMCC) highlighted the strategies and operational frameworks needed to modernize cybersecurity protocols.
SEMICON Korea Highlights:
- Applied Materials’ Suk Won Kang discussed SMCC Working Group (WG) 9 – a new group for addressing cybersecurity challenges unique to South Korea’s semiconductor ecosystem. WG9 was formed to better understand Korean cybersecurity risks, align with global standards, and operationalize compliance with existing SEMI frameworks.
- Alan Weber from PDF Solutions presented on cybersecurity as it relates to industry standards. He offered an overview of today’s technical challenges, highlighting how independently developed and secure data exchange frameworks can complement existing standard interface capabilities.
SEMICON China: EHS TC Chapter Formation Group Meeting
Following SEMICON Korea, SEMICON China convened thousands of attendees from March 25-27 to discuss the most important technology trends driving innovation. Alongside the event, the EHS TC Chapter Formation Group Meeting took place on March 25 to review global EH&S standards overview, SEMI Regulations for forming China TC Chapter, and issues including Safety Management System, Product Safety System, and Semiconductor Robots
Progress from SEMI Standards 2026 North America Winter Meetings
The Standards team hosted its SEMI Standards NA Winter Meetings virtually from February 9-12. With a packed agenda, the meetings convened several TCs, including MEMS/NEMS, Facilities & Gases, Liquid Chemicals, Information & Controls, and more. Over a dozen new documents were submitted for approval.
The NA 3D Packaging & Integration Inspection & Metrology TF proposed a new standard in Document 7331, Guide for Peel Testing of RDLs and Other Traces Used Within Advanced Packages and Structures. This document was approved by the 3DP&I NA TC Chapter during the NA Winter Meetings in February and recently passed procedural review by the ISC Audit & Review Subcommittee. Current peel testing test methods are designed for and limited to 10 mm and wider traces, which are mainly used for PCBs.
iNEMI has been investigating potential re-distribution layers (RDLs) adhesion measurement methods for RDL trace widths 20 microns and smaller to determine the actual adhesion properties associated with these smaller structures. The adhesion properties of the smaller structures are important for HDI, WLP and PLP designs, and modeling. This standard provides guidance for peel testing of small trace structures used in WLPs, PLPs, and other advanced packages based on knowledge gained during the iNEMI RDL Adhesion project. Available soon at the SEMI store, this Standard can be used to determine the adhesion properties of the structure (trace bond to substrate).
Other key developments from the NA Winter Meetings include:
- Document 7370 – Reapproval of SEMI MS13-0221, Guide for Use of Test Patterns for Characterizing a Deep Reactive Ion Etching (DRIE) Process, introduced by the MEMS/NEMS TC.
- Document 7436 - Reapproval of SEMI E180-1220, Test Method for Measuring Surface Metal Contamination Through ICP-MS of Critical Chamber Components Used in Semiconductor Wafer Processing, introduced by the Metrics TC.
- Document 7428 - Revision to add a new subordinate Standard, Specification for Secure High-Speed SECS Message Service, to SEMI E37-0222 Specification for High-Speed SECS Message Services (HSMS) Generic Services. This was introduced by the Information & Control TC.
- Document 7371A – Revision of SEMI S1-0824, Safety Guideline for Equipment Safety Labels. The revision was intended to add numerous safety symbols including finger pinch, entrapment, shear hazard, inhalation hazard and many others.
- Document R67346C - Revision to SEMI E95-1101, Specification for Human Interface for Semiconductor Manufacturing Equipment. This was introduced by the Information & Control TC.
New and Revised Standards Released in Q1
January 2026
February 2026
March 2026
Get Involved
SEMI Standards development activities take place throughout the year in all major manufacturing regions. To participate, join the SEMI International Standards Program.
SEMI Standards are available through individual download purchases or online via SEMIViews. Watch this video to learn more about how SEMIViews offers a cost-effective and streamlined way to access 1,110+ SEMI Standards. Sign up for a 30-day SEMIViews trial.
For more information, please visit the Standards website and events page. For any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.
Paul Trio is Director of Standards at SEMI.
