Brooks Instrument
Jan 1, 1975
1154
Flow instrumentation for semiconductor processing: Brooks Instrument provides a comprehensive line of flow and pressure measurement and control products. Mass Flow Controllers; Flow Meters and Pressure Controllers. Elastomer and Metal Seals; Ultra Clean Processing; Reduced Laylength, Digital Processing/Communications, and TruCal™ actual gas calibrations. Corilis PFA mass-flow controllers for CMP slurries and other process chemicals.
Primary Industry
Semiconductor
Primary Product Category
Equipment and Sub-Systems
Primary Product Sub Category
Subsystems
Website
407 West Vine Street
Hatfield
PA
19440-0903