CS CLEAN SOLUTIONS GmbH
Jan 1, 2003
13418
With more than 35 years of experience, CS CLEAN SOLUTIONS GmbH is your reliable
partner for exhaust gas abatement in semiconductor, photovoltaic and related industries. Our customers include all major chip manufacturers and the world's leading research institutes.
Our environmentally friendly CLEANSORB®technology is developed in Ismaning near
Munich and marketed through an international sales and service network.
As the global technology leader in our field, our dry exhaust gas abatement does not require the use of fossil fuels or water providing additional benefits to the environment and the climate.
More than 7500 installations worldwide testify to the trust of customers in our unique
products and services, which we are always developing with foresight and an eye to the challenges of the future:
• Exhaust gas treatment for e.g. ion implantation, plasma etching, chamber cleaning,
photovoltaics, HDP-CVD, LPCVD, PECVD, MOCVD, ALD
• Safe, dry-chemical conversion of toxic gases into stable solids
• Solutions for research and production
• Global network for service and refill through local partners
The new product line PCS PLASMA CONVERSION SYSTEMS now enhances the
CLEANSORB® product portfolio.
PCS TROPO/ PCS STRATO: high-efficiency atmospheric plasma for the removal of
perfluorinated compounds (PFCs) emitted during semiconductor etching and related
processes. Resource-saving and water-free operation.
PCS EXO: ammonia and hydrogen removal - hybrid plasma system for GaN and similar process applications.
partner for exhaust gas abatement in semiconductor, photovoltaic and related industries. Our customers include all major chip manufacturers and the world's leading research institutes.
Our environmentally friendly CLEANSORB®technology is developed in Ismaning near
Munich and marketed through an international sales and service network.
As the global technology leader in our field, our dry exhaust gas abatement does not require the use of fossil fuels or water providing additional benefits to the environment and the climate.
More than 7500 installations worldwide testify to the trust of customers in our unique
products and services, which we are always developing with foresight and an eye to the challenges of the future:
• Exhaust gas treatment for e.g. ion implantation, plasma etching, chamber cleaning,
photovoltaics, HDP-CVD, LPCVD, PECVD, MOCVD, ALD
• Safe, dry-chemical conversion of toxic gases into stable solids
• Solutions for research and production
• Global network for service and refill through local partners
The new product line PCS PLASMA CONVERSION SYSTEMS now enhances the
CLEANSORB® product portfolio.
PCS TROPO/ PCS STRATO: high-efficiency atmospheric plasma for the removal of
perfluorinated compounds (PFCs) emitted during semiconductor etching and related
processes. Resource-saving and water-free operation.
PCS EXO: ammonia and hydrogen removal - hybrid plasma system for GaN and similar process applications.
Primary Industry
Semiconductor
Primary Product Category
Fab Infrastructure and Services
Primary Product Sub Category
Other
Keywords
exhaust gas abatement, dry bed, world wide refill, mocvd, eco-friendly, environmental protection, cigs, waste gas, semiconductor, process gas
Website
Fraunhoferstrasse 4
Ismaning
85737