会社概要
主力製品は流体計測・制御機器「マスフローコントローラ」。ガスや液体の流量制御、液体の気化、製造装置内の真空計測・制御装置など、半導体・電子デバイスの製造プロセスに不可欠な機器を開発、製造、販売。米国シリコンバレーに「ホリバテクノロジーセンター」を、京都には「福知山テクノロジーセンター」と次世代ハイテク材料の制御機器開発を行う本社隣接の「HORIBA最先端技術センター」。この三拠点が研究開発を支えています。
Company Info
HORIBA STEC’s flagship product, the fluid measurement and control “ mass flow controller”. Development, manufacturing, and sales of equipment essential to the semiconductor manufacturing process, such as flow control for gases and liquids, liquid vaporization and vacuum measurements within the manufacturing equipment. Our “HORIBA Technology Center” is located in Silicon Valley and “Fukuchiyama Technology Center”, “HORIBA Advanced Technology Center” are located in Kyoto. These three facilities support our research and development.
Highlights
HORIBA STEC was the first to commercialize and put a gas flow rate mass flow controller into practical use in Japan. We continue refine these unique technologies and we will try to propose and solve variety of problems with our HORIBA group’s analytical and measurement technology in Flexible Hybrid Electronics(FHE) field.
Products/Services
The mass flow controller accurately controls the gas to the chamber. Liquid source vaporization system is control liquid materials, H2O etc. Compact process gas monitor is measure residual gas in chamber. Plasma emission controller is control plasma condition during film formation. Infrared thermometer is accurately measure temperature during film formation.
