Dongfang Jingyuan Electron Co., Ltd.
Mar 28, 2016
268578
硬件产品 1.电子束晶圆关键尺寸测量,缺陷检测和复查装备:实现高分辨成像,高精度测量,为开发与量产流程中产能提高及制程控制提供解决方案。 2.高速大容量实时数据并行处理计算平台。软件产品:光刻优化软件Hardware Products: 1.Wafer Ebeam inspection equipment, for process control and yield improvement. 2.High speed realtime data processing platform for inspection and optimization.Saft products:OPC and SMO.
Primary Industry
Semiconductor
Primary Product Category
Equipment and Sub-Systems
Primary Product Sub Category
Metrology/Inspection
Website
北京经济技术开发区经海四路156号院12号楼
北京
100176