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Individual SEMI Standards
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Note: Historical versions of SEMI Standards are also available for purchase. To view the historical document enter a search term on Standards search page (and click "Historical"). If a document is not available on the Historical Standards page, please contact customer service at 408.943.6901, or by email at email@example.com, to request that it be added. Please be aware that information contained in older versions of SEMI Standards may be obsolete. SEMI encourages the use of current Standards.
If you are purchasing multiple Standards, our SEMIViews web portal might be a better choice for your needs and budget. Visit http://www.semi.org/SEMIViews for more information.
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