Micro-electromechanical systems (MEMS)—Microsystems Technology (MST) Micro-Machines are an increasingly pervasive technology in our daily lives. Smartphones and tablets feature an array of MEMS, from motion sensors and gyroscopes, to microphones and speakers; while automotive MEMS are present from airbag systems and brakes, to emissions control and navigation. Still more opportunities exist for MEMS in other applications, including biomedical sensors and drug delivery systems. According to Yole Développement, the MEMS market is positioned to grow 16% per year (CAGR) through 2014, rising to a $14 billion market.
SEMI brings the industry together at SEMICON expositions around the world. Popular MEMS Forums are held at the following MEMS events:
The charter of the MEMS / NEMS Technical Committee is to develop standards for MEMS & NEMS devices that cannot be handled by existing technical committees. Current topics include Wafer Bonding Alignment Targets; Step-Height Measurements of Thin, Reflecting Films using an Optical Interferometer; and Ultra High Purity Microscale Fluidic Systems for Use in Scalable Process Environments.