Volume 9, Issue 1 |
Equipment Information System Security
June 12, 2014 |
From the Director's Desk James Amano Senior Director Wafer Geometry Control for Advanced Semiconductor Manufacturing The SEMI Standards Silicon Wafer Committee has been the foundation of the SEMI Standards Program for over 40 years, developing critical standards for wafer specifications, metrology, and material characteristics. While recent focus has been on development of 450mm related standards, critical work still remains to be done that is not specific to wafer diameter. While industry collaboration on measurement methods for wafer geometry, bulk metals, stress, surface particles, and crystal characterization has enabled silicon wafer development and high volume manufacturing wafer quality control to keep pace with Moore’s Law, the relentless reduction in feature sizes in semiconductor manufacturing increasingly makes it difficult to perfect processes with high yield and high uniformity. These process challenges require that variation of the geometry of the wafer be controlled and monitored throughout the process flow. While wafer geometry standards have typically focused on the quality of the starting bare wafer, it is equally important today to monitor and control process-induced wafer geometry changes. To introduce the challenges that lay ahead, SEMI is pleased to host the upcoming Wafer Geometry Control for Advanced Semiconductor Manufacturing seminar, to be held in conjunction with SEMICON West 2014, on July 9, in the San Francisco Marriott Marquis Hotel. Authoritative customers, including IBM, Intel, and Micron, will present recent developments and future needs for advanced semiconductor manufacturing. More... REGISTER NOW! SEMI Standards Program Updates New and Revised SEMI Standards Are you looking for new or revised SEMI Standards, but find it difficult to figure out what was recently published? Stay up to date with the SEMI Standards Update Notification Newsletter, a weekly email notice of newly published Standards. Note: SEMIViews users are automatically subscribed to the SEMIViews Update Notification and will receive a monthly email notice as new or revised Standards are published. You may opt-out at any time by updating your SEMIViews User Preferences. In addition to receiving the Standards Update Notification Newsletter; any time during a publishing cycle, view a list of new or revised Standards that have been published for the current cycle. Subscribe to Standards Watch and other SEMI Newsletters |
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