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The SEMI Standards Program brings together experts to exchange ideas and work towards developing globally accepted technical standards.

Starting from the SECS (SEMI Equipment Communications Standard) and GEM (Generic Model for Communications and Control of Manufacturing Equipment) standards, and more recently with Equipment Data Acquisition standards, the SEMI Standards Program has served as the platform for development of advanced automation standards enabling Smart Manufacturing across the microelectronics industry.

Smart Manufacturing Standards Chart

Click to see full image

 

SEMI Smart Manufacturing Standards

  • Modern fabs gather constant streams of data from hundreds of sensors, enabling real-time optimization of manufacturing processes to improve yield, mitigate defects, and enhance productivity towards reducing cost and cycle time.
  • As features sizes shrink, with more restrictive tolerances the need for greater visibility into the entire manufacturing process has intensified, and specific manufacturing information (e.g. equipment health and performance and process monitoring) must be collected in increasingly greater amounts, and as close to real time than ever before.

Investment in equipment automation and equipment data acquisition is absolutely critical for High Volume Manufacturing (HVM) thought the primary challenges due to automation complexity, time consuming equipment integration, have to be overcome to access data necessary for troubleshooting issues. Early adoption & implementation of Standards in the manufacturing process is much easier than retrofitting afterwards.

 

Critical SEMI Standards for Productivity

 

CONNECTIVITY
 

Communication Protocols

Equipment Control

 

Metrics

 

Automation Technology
 

Automated Test Equipment

 

Surface-Mount Technology Assembly Lines Automation [Smt-Els]

 

Automation for Adjacent Industries

 

Information models – variable/event ID lists, structured equipment metadata, classification labels for instance domains
 

Equipment Data Acquisition & Process Diagnostics

 

Traceability

 

Data Security
 

Cybersecurity

 

Factory System Architecture - CIM Framework, Big Data/AI/ML support, AWS-style designs for high scalability/availability

 

Predictive Analytics
 

Advanced Analytics and Process Control

 

Digital Twins – fault/control models and material status for APC, factory snapshots for scheduling/dispatching, frameworks for managing them
 

Data Integration & Management

 

Articles & White Papers

 

Questions?

For more information about the SEMI Smart Manufacturing initiative, contact Mark da Silva at smartmfg@semi.org.