Applied MicroStructures, Inc.
Jan 1, 1977
169970
Applied Microstructures’ (AMST) technology reduces manufacturing costs and enables new products for a very broad range of technology areas, such as—semiconductor, biomedical, inkjet print heads, automotive, and consumer electronics. Proprietary Molecular Vapor Deposition (MVD®) is AMST’s method of low temperature vapor deposition of complex molecules for critical applications such as anti-stiction, moisture barriers, and adhesion control. The process chemistry and deposition equipment are unique to the market, enabling technologies for products that could not otherwise exist, and allowing significant cost savings through new approaches to conventional manufacturing. A notable aspect of MVD technology is that it is uses very little source precursor to reach the desired coating thickness. A full batch process run typically utilizes <200 mg of source chemicals – as a result, cost of consumables is extremely low and the cost of waste disposal is essentially zero. Our process tools are capable of ALD, MVD® and CVD reactions. We are able to deposit single-element and mixed oxides at low temperatures (most below 60 C) with extremely high conformality – one example now in production is coating a microfluidic channel that is 250 μ in diameter by 0.6 meters long, a 2000:1 aspect ratio. We have a library of over 40 unique film compositions to draw from. MVD can also deposit various organic, polymer and metal-organic films, and can produce complex multi-layer film stacks with beneficial chemical and mechanical properties. MVD is well-suited for the modification of surface energies to achieve a wide range of liquid contact angles, from hydrophilic to hydrophobic, and these films are stable to very high temperatures (~500°C) and at high humidity levels. AMST is also innovating in areas of electronic packaging, corrosion protection and polymer film modification for moisture barrier applications. More than 70 systems are currently installed in the US, Europe, the Middle East, and Asia, in advanced development and volume production. Multiple systems are qualified for production at the world’s largest MEMS manufacturers, enabling them to overcome serious yield issues in their devices. AMST equipment is installed at several world leading advanced development laboratories. AMST also provides manufacturing process services for many leading companies as part of their production process.
Primary Industry
Semiconductor
Primary Product Category
Equipment and Sub-Systems
Primary Product Sub Category
Deposition
Website
2381 Bering Drive
San Jose
CA
95131-1325