Letter ballots are periodically issued by SEMI Standards. The letter ballot is the first step in the approval process required for publication of a new or revised standard.
Cycle 7-23 is now open. The last day for voting is October 13, 2023.
Cycle 6-23 is now closed. However, some committees still need more votes.
SEMI Standards Critical Dates
Document submission deadlines and voting periods for upcoming technical ballots.
How to Vote on SEMI Standards Ballots
Detailed instructions on how to view ballot files and how to vote on SEMI Standards ballots. Includes screenshots.
Informational ballots are used to receive comments and refine a standards draft document prior to being issued as a Letter Ballot.
Recently Approved Ballots
Draft Documents recently approved by various Technical Committees. Pending successful procedural review, these Documents will be approved for publications.
Procedural Review Results: August 2023 | July 2023 | May 2023 | February 2023 | December 2022 | October 2022 | August 2022 | June 2022 | May 2022 | March 2022 | January 2022
The ISC A&R SC shall determine whether the procedural requirements of these Regulations have been met and whether a satisfactory consensus has been reached on standards actions. (Regulations ¶ 11.1).