SPPテクノロジーズ株式会社
URL : http://www.spp-technologies.co.jp/
Tel : 06-6489-5997
Mail : sales@spp-technologies.co.jp
SPP Technologies Co., Ltd.
URL : http://www.spp-technologies.co.jp/
Tel : 06-6489-5997
Mail : sales@spp-technologies.co.jp
Company Info
SPP Technologies offers silicon deep RIE, sacrificial layer etching, thick film CVD, PVD and various process equipments and technologies.
We are as leading supplier of silicon deep RIE for MEMS and Semiconductor, and have 22nd years from DRIE sales. And we propose some solutions for 3D-IC, power device, MEMS, LED, and so on.
Highlights
SPT will present some latest technologies regarding new developed DRIE, Compound Semi. etching system, Minimal system, and so on.
Products/Services
- Si Deep Reactive Ion Etching (DRIE) System(ASE-Proxion, Predeus, Pegasus, Pegasus300, SRE)
- Plasma Dicing System(Mosaic)
- Sacrificial Layer Etching System(SLE-Ox, SPTS-Primaxx-uEtch, XACTIX-Xetch)
- SiC, Compound Semi/Oxide Etching System(APS-Sirius, Spica)
- Plasma Enhanced CVD System(Cetus, SPTS-Delta)
- PVD System(SPTS-Sigma)
- Furnace System(SPT USA-AVP/RVP/RVP-300)
- Minimal System(DRIE, Plasma TEOS-CVD, Metal Plasma Etcher)
