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Atomic Layer Deposition for More-than-Moore Devices in a Perspective of the Wafer Fab Equipment Market, Taguhi Yeghoyan, Senior Technology & Market Analyst, Semiconductor Equipment, Subsystem and Test Division, Yole Intelligence

ALD Applications for More-than-Moore: Overview and Case Example from SiC, Alexander Perros, Head of Process Development, Semiconductor ALD, Beneq

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