SCIS Overview

The Semiconductor Components, Instruments, and Subsystems (SCIS) Technology Community represents companies that produce, package and/or distribute any of the following used in semiconductor or related industries:
-
Components such as seals, filters, mass flow controllers, valves, sensors, ion beam sources, etc.
-
Instruments for in-line and off-line data measurement, collection, and monitoring
-
Sub-systems that support process tools e.g. vacuum, robotics, power conversion, abatement, chillers, etc.
Focus: Establishing a baseline for measuring defects introduced by process-critical components
- Particle or defect limits will not be defined, but will focus on defining consistent methodologies for measuring defects
SCIS provides a forum that fosters discussion and aligns stakeholders on pre-competitive industry-critical issues.

SEMI Standards related to SCIS

SCIS has played an important role in the development of the following Standards
- SEMI F51 - Guide for Elastometric Sealing Technology
- SEMI E135 - Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment
- SEMI E180 - Test Method for Measuring Surface Metal Contamination Through ICP-MS of Critical Chamber Components Used in Semiconductor Wafer Processing
- SEMI F114 - Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components
- SEMI F115 - Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components
- SEMI F70 - Test Method for Determination of Particle Contribution of Gas Delivery System

SCIS - Participating Members

SCIS Members include
- Component Suppliers
- Device Makers
- Equipment OEMs
- Service Providers (Clean, Metrology, Analytics)

Join SCIS

Interested in becoming an SCIS Member? Gain a seat in this thriving group and help promote awareness of the components and systems issues and challenges the industry encounters in meeting the expectations of customers.
If you are already a SEMI member, but not yet a part of the SCIS, contact Paul Trio at ptrio@semi.org or Mayura Padmanabhan at mpadmanabhan@semi.org. Separately, members may access presentations and market statistics for the whole semiconductor supply chain in the SEMI Resource Library. SEMI Membership is required to access this content.
- To join SCIS, you have to be a SEMI member. Learn more about SEMI membership and cost of membership.
- Fill out our membership application.
- Contact your local SEMI office to speak to a representative from that region or email us with any questions at membership@semi.org.
MAKE INDUSTRY CONNECTIONS
- Access to the entire SEMI member network
- Connect with other SEMI technology communities
ENGAGE WITH INDUSTRY PEERS
- Join working groups to solve challenges
- Meet influencers at neutral technical forums
- Engage in global advocacy on issues such as trade building, talent, and technology development
BUILD YOUR BRAND
- Speak at influential industry events around the globe
- Connect to our one-of-a-kind PR Program for marketing activities including blogs and webinars.
GAIN MARKET INSIGHTS
- Members-only resources available 24/7 including market data reports, white papers, webinar recordings, presentations and more
ENJOY MEMBER DISCOUNT
- Member pricing on conferences, exhibitions and industry research
- Cost savings on many everyday fab and business needs

Paul Trio Mayura Padmanabhan
Director, Standards Technical Project Manager
ptrio@semi.org mpadmanabhan@semi.org
Featured Articles

- Photo Mask Challenges at 3nm and beyond (published January 2022, Semiconductor Engineering)
- An OSAT Perspective on Semiconductor Market Trends (published January 2023)
- Measuring Critical Parameters of Perfluoroelastomers Used in HVM at Advanced Process Nodes (published April 2018)
- Why Fabs Worry About Tool Parts (published August 2017, Semiconductor Engineering)
- Establishing a Baseline for Measuring Defects Introduced by Process-critical Components through SEMI SCIS Special Interest Group (published July 2017)
- Addressing Killer Defects of Critical Components for Next-Generation High-Volume Manufacturing (published July 2016)
- Industry Stakeholder Collaboration Helps Enable Success of Next-Generation High-Volume Manufacturing (published April 2016)

Device Maker Perspectives on the SCIS Initiative
Extension Media Interview at IEDM in San Francisco on Dec. 5. 2018