metrology

SEMI spoke with Eyal Shekel, senior VP of Service Strategy and Excellence at Tokyo Electron Limited, about the impact of artificial intelligence (AI) on smart manufacturing and how other fab solutions for smarter process tools are advancing semiconductor manufacturing.

The costs of production are typically based on labor and materials and define manufacturing expenses. What about the cost of poor quality and lack of efficiency in production? How is the pandemic impacting semiconductor manufacturing and what can we expect from the future?

Despite the need for more advanced anticipation solutions, the penetration of AI for quality prediction remains limited. This is especially true for more advanced AI techniques, such as neural networks, which perform better in modelling complex systems but require vast amounts of balanced data.

SEMI spoke with Thomas Fries, founder and CEO of FRT GmbH, about how hybrid metrology is shaping multi-sensor metrology tools to enhance measurement precision as the industry moves away from a single-sensor approach.