October 18, 2023
Sponsored by the Electronics business of Merck KGaA, Darmstadt, Germany
Time
4:00 pm - 5:00 pm
Location
Online, Central European Time (CEST)
Germany
Revolutionizing Materials and Products
Innovations in Atomic Layer Deposition (ALD) and Atomic Layer Etch (ALE)
This is the 6th webinar in our series to explore trending topics on materials and semiconductor development.
Join us to discover how innovations in selective surface-controlled processes, including Atomic Layer Deposition (ALD) and Atomic Layer Etch (ALE), enable the manufacture of advanced electronic devices.
During this interactive session, you will learn innovative approaches to depositing metal films. Building on the proven track record as a safe and reliable supplier to the semiconductor industry, the Electronics Business of Merck KGaA, Darmstadt, Germany, experts will discuss novel vapor-phase ALE processes that selectively and precisely etch metals. These methods, without requiring plasma generation, wet etch steps, or corrosive gas, enable facile integration of isotropic ALE into High-Volume Manufacturing (HVM).
Commercializing these tools requires a deep understanding of reaction mechanisms including the impact of trace impurities on film properties, tight control of precursor delivery to the tool, and availability of advanced metrology to monitor precursor delivery.
Stay tuned and engage with technology leaders to discover both ALD and ALE solutions.
Why Attend?
The Semiconductor Materials Series attracts global professionals, business and technology leaders, researchers, academics, and industry analysts from across the electronics supply chain.
In this webinar, you will gain practical insights on:
- Various approaches to conformally deposit and etch thin metal films
- Reaction mechanisms and impact of impurities on deposition and etch processes
- Challenges and industry requirements to commercialize advanced precursors
Who Should Attend?
- Chemical Vapor Deposition (CVD), ALD, and ALE engineers
- Material technology management teams
- Supply chain, procurement, process, and technology development professionals
Register today to access exclusive content.
You will be able to apply innovative techniques and best practices to solve your unique challenges.
Don't miss the chance to ask the experts questions during the live Q&A.
Attendees are invited to submit questions ahead of time at info_semi_webinar@emdgroup.com.
Agenda
Welcome Remarks
Biography
Sergei Ivanov, Senior R&D Manager, Organometallics, Thin Films Business at the Electronics business of Merck KGaA, Darmstadt, Germany
Sergei Ivanov is the Senior R&D Manager in the Organometallics division of Thin Films Business, where he leads a research program developing novel precursors for deposition of metal, metal nitride and metal oxide films. He is based at the R&D and manufacturing site in Hometown, Pennsylvania, USA. Sergei received a PhD in Inorganic Chemistry from Kurnakov Institute of Russian Academy of Sciences and a B.S. in Chemical Engineering from Mendeleev University of Chemical Technology.
Biography
Martin McBriarty (he/him) leads the development of atomic layer etch and other vapor-phase etch methods at the Intermolecular site in San Jose, California, USA. He earned his B.S. in Materials Science & Engineering at the University of Florida in 2008 and his Ph.D. in the same field at Northwestern University in 2014, during which he also studied at the Fritz Haber Institute as a Fulbright scholar. Martin joined Intermolecular in 2018 after completing postdoctoral research at Pacific Northwest National Laboratory.
Live Q&A and Conclusions
Learn more
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