SEMI E10 and SEMI E79 are the two most widely used equipment performance metrics Specification Standards in the semiconductor and other related high-tech areas. SEMI E10 provides the methodologies needed for measuring and evaluating equipment reliability, availability, and maintainability (RAM) and utilization performance. SEMI E79 provides the methodologies needed for measuring and evaluating the productivity of equipment, using metrics such as overall equipment efficiency (OEE) and throughput. These Standards play a critical role in the everyday operations in manufacturing facilities, such as wafer fabs, around the world.
In response to many question on how to correctly apply SEMI E10 and E79, the SEMI Standards Equipment Reliability, Availability, Maintainability, and Productivity (RAMP) Task Force released this free webinar which serves to enhance the application and correct usage of the current SEMI E10 and E79 Standards.
Metrics Webinar Education Series for SEMI E10 and E79
Presented By: David L. Bouldin
Chair, North America Chapter of the Metrics Global Technical Committee
Webinar 1 - SEMI Metrics Global Technical Committee and Equipment Reliability, Availability, Maintainability, and Productivity (RAMP) Standards Overview
A complimentary, very high-level overview of the Metrics Global Technical Committee and the equipment performance-related metrics Standards SEMI E10 and E79, and how they work together with SEMI E58 and E116. (~ 30 minutes)
Presenter: David L. Bouldin, Chair, North America Chapter of the Metrics Global Technical Committee
Register to Watch
Webinar 2 - SEMI E10 RAM and Utilization Specification Standard Overview
A complimentary high-level overview of the contents of SEMI E10. This SEMI E10 webinar is primarily intended for users who may be interested in purchasing E10 and to provide a very basic understanding of the key E10 terms and concepts. (~ 60 minutes)
Presenter: David L. Bouldin, Chair, North America Chapter of the Metrics Global Technical Committee
Register to Watch
Webinar 3 - SEMI E79 RAM and Utilization Specification Standard Overview
A complimentary high-level overview of the contents of SEMI E79. This SEMI E79 webinar is primarily intended for users who may be interested in purchasing E79 and to provide a very basic understanding of the key E79 terms and concepts. (~ 40 minutes)
Presenter: David L. Bouldin, Chair, North America Chapter of the Metrics Global Technical Committee
Register to Watch
Webinar 4 - SEMI E10 RAM and Utilization Specification Standard Applications, Parts 1 and 2
Presenters: David P. Busing and Steven J. Meyer
This two-part complimentary webinar covers the detailed example scenario, found in SEMI E10 Related Information 2.
Part 1 (~90 min.) demonstrates how to track the equipment states for different types of equipment systems. This webinar assumes that the user is already familiar with SEMI E10. Register to Watch (Part 1)
Part 2 (~ 30 min.) focuses on using the data obtained from Part 1 to demonstrate how to calculate all of the E10 fundamental quantities and metrics for individual equipment modules, the intended process sets, and the multi-path cluster tool. Register to Watch (Part 2)
For the latest developments and more information regarding the Metrics Webinar Education Series, please contact David Bouldin at david.bouldin@sbcglobal.net.
Metrics Webinar Education Series Presenters
Mr. Bouldin has been active in the development of SEMI Standard activities since 1993 and has served as cochair of the SEMI North America (NA) Chapter of the Metrics Global Technical Committee since 1996. He currently coleads the Equipment Cost of Ownership (COO) Task Force. He also actively participates on several other task forces including the Equipment RAMP Metrics Task Force. He is a voting member of the SEMI NA Regional Standards Committee (NARSC), the Technical Editors Board, and one of two NA representatives on the Regulations Subcommittee. He received the SEMI NA Standards Corporate Device Member Award in 1999, the Technical Editor Appreciation Award in 2000, the Leadership Award in 2005, and the Excellence Award (inspired by Karel Urbanek) in 2014. After retiring from Texas Instruments in 2007, he is the founder and Principal Consultant of Fab Consulting.
David P. Busing
Dr. Busing has been active in the development of SEMI Standards since 1996. He has been a member of the Equipment RAMP Metrics Task Force since 1996 and coleader since 2010. He is a member of the Metrics Global Technical Committee. He has also served as a vice-chair of the North America Regional Standards Committee (NARSC). He has helped design and implement data systems for equipment performance tracking for KLA and Brooks Automation.
Steven J. Meyer
Mr. Meyer has been active in the development of SEMI Standards since 1995. He was the principal author of both SEMI E87 and E116 in the Information & Control Global Technical Committee. He is now a regular contributor on E10 and E79 and has been a coleader of the Equipment RAMP Metrics Task Force since 2012. He is a member of the Metrics Global Technical Committee. He is a Senior Principal Engineer at Intel in the Manufacturing IT group.