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SCIS Overview


The Semiconductor Components, Instruments, and Subsystems (SCIS) Technology Community represents companies that produce, package and/or distribute any of the following used in semiconductor or related industries:

  • Components such as seals, filters, mass flow controllers, valves, sensors, ion beam sources, etc.

  • Instruments for in-line and off-line data measurement, collection, and monitoring

  • Sub-systems that support process tools e.g. vacuum, robotics, power conversion, abatement, chillers, etc.

Focus: Establishing a baseline for measuring defects introduced by process-critical components

  • Particle or defect limits will not be defined, but will focus on defining consistent methodologies for measuring defects

SCIS Overview and Activity Status (pdf)


Device Maker Perspectives on the SCIS Initiative

Extension Media Interview at IEDM in San Francisco on Dec. 5. 2018

SCIS Structure

Interested in becoming a SCIS Member?
If you are already a SEMI member, but not part of SCIS, contact Paul Trio at

If you are not a SEMI member, please reach out to your local SEMI Membership Contact or fill out a SEMI Membership Application.

Member Only Access
Separately, members may access presentations and market statistics for the whole semiconductor supply chain in the SEMI Resource Library. SEMI Membership is required to access this content.


SCIS Participating Companies