The Semiconductor Components, Instruments, and Subsystems (SCIS) Technology Community represents companies that produce, package and/or distribute any of the following used in semiconductor or related industries:
Components such as seals, filters, mass flow controllers, valves, sensors, ion beam sources, etc.
Instruments for in-line and off-line data measurement, collection, and monitoring
Sub-systems that support process tools e.g. vacuum, robotics, power conversion, abatement, chillers, etc.
Focus: Establishing a baseline for measuring defects introduced by process-critical components
- Particle or defect limits will not be defined, but will focus on defining consistent methodologies for measuring defects
Device Maker Perspectives on the SCIS Initiative
Extension Media Interview at IEDM in San Francisco on Dec. 5. 2018
Interested in becoming a SCIS Member?
If you are already a SEMI member, but not part of SCIS, contact Paul Trio at email@example.com
Member Only Access
Separately, members may access presentations and market statistics for the whole semiconductor supply chain in the SEMI Resource Library. SEMI Membership is required to access this content.
SCIS Participating Companies
- Measuring Critical Parameters of Perfluoroelastomers Used in HVM at Advanced Process Nodes (published April 2018)
- Why Fabs Worry About Tool Parts (published August 2017, Semiconductor Engineering)
- Establishing a Baseline for Measuring Defects Introduced by Process-critical Components through SEMI SCIS Special Interest Group (published July 2017)
- Addressing Killer Defects of Critical Components for Next-Generation High-Volume Manufacturing (published July 2016)
- Industry Stakeholder Collaboration Helps Enable Success of Next-Generation High-Volume Manufacturing (published April 2016)