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September 27, 2023 - September 27, 2023

standards

SEMI Silicon Wafer Roughness Workshop - AFM Workgroup

Location: Online (Contact staff for call-in information)

Agenda (Link)

Purpose:

  • Develop a SEMI standard protocol to align on AFM tool conditions and measurement parameters.
  • In the latest workgroup meeting (August 02, 2023), different requirements on AFM roughness measurements were discussed.
  • The points of discussion are collected in a “Questionnaire on AFM Roughness measurements.” This questionnaire shall be distributed to all participants to collect suggestions on AFM roughness measurement conditions. The feedback on the questionnaire will be discussed in a follow-up meeting.
  • Discuss on a possible questionnaire, the organization of response collection and general organizational topics of the AFM workgroup.
Time

8:00 am - 9:00 am

Add to Calendar 2023-09-27 08:00:00 2023-09-27 09:00:00 SEMI Silicon Wafer Roughness Online Workshop SEMI Silicon Wafer Roughness Workshop - AFM Workgroup Location: Online (Contact staff for call-in information) Agenda (Link) Purpose: Develop a SEMI standard protocol to align on AFM tool conditions and measurement parameters. In the latest workgroup meeting (August 02, 2023), different requirements on AFM roughness measurements were discussed. The points of discussion are collected in a “Questionnaire on AFM Roughness measurements.” This questionnaire shall be distributed to all participants to collect suggestions on AFM roughness measurement conditions. The feedback on the questionnaire will be discussed in a follow-up meeting. Discuss on a possible questionnaire, the organization of response collection and general organizational topics of the AFM workgroup. Online, Pacific Time, United States SEMI.org contact@semi.org America/Los_Angeles public
Location

Online, Pacific Time,
United States

standards

Contact

Kevin Nguyen
Manager, International Standards Operations
knguyen@semi.org