Environmental, Health, and Safety Guidelines Standards

The SEMI Standards Program brings together experts to exchange ideas and work towards developing globally accepted safety guidelines.

Starting from the SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment , the SEMI Standards Program has served as the platform for development of standards enabling safety guidelines across the microelectronics industry.

Today, the Environmental Health and Safety (EH&S) Global Technical Committees continue to develop new Safety Guidelines, examining topics such as , equipment safety, ergonomics, energy conservation, electrical safety, exhaust ventilation, fire risk assessment,  worker protection, and rising issues for semiconductor and related industries.

MANUFACTURING EQUIPMENT

• SEMI S2 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

ERGONOMICS

• SEMI S8 - Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment

ELECTRICAL DESIGN

• SEMI S22 - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

ENERGY CONSERVATION

• SEMI S23 - Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment

EQUIPMENT LABEL

• SEMI S1 - Safety Guideline for Equipment Safety Labels

EXHAUST VENTILATION

• SEMI S6 - Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

ENERGETICS MATERIALS

• SEMI S30 - Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes

RISK ASSESSMENT

• SEMI S10 - Safety Guideline for Risk Assessment and Risk Evaluation Process

• SEMI S14 - Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

WORKER PROTECTION

• SEMI S21 - Safety Guideline for Worker Protection

ALL OTHER

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Future Topics to Support Safety

• Equipment safety
• Energy conservation
• Exhaust ventilation
• Ergonomics
• Interlocks Design
• Risk assessment
• Pressure Guidelines