Oxford Instruments
Apr 1, 2016
14627
Oxford Instruments designs, supplies, and supports high-technology tools and systems with a focus on research and industrial applications. Innovation has been the driving force behind Oxford Instruments' growth and success for 60 years, supporting its core purpose to address some of the world’s most pressing challenges.
Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable, and repeatable engineering of micro / nano-structures and material layers. Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition, and the controlled growth of nanostructures. These solutions are based on core technologies in plasma-enhanced deposition and etch, ion beam deposition and etch, atomic layer deposition (ALD), deep silicon etch, and chemical vapour deposition. Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.
Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable, and repeatable engineering of micro / nano-structures and material layers. Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition, and the controlled growth of nanostructures. These solutions are based on core technologies in plasma-enhanced deposition and etch, ion beam deposition and etch, atomic layer deposition (ALD), deep silicon etch, and chemical vapour deposition. Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.
Primary Industry
Semiconductor
Primary Product Category
Equipment and Sub-Systems
Primary Product Sub Category
Etch
Website
Tubney Woods, Abingdon
Oxfordshire
OX13 5QX