Semilab Semiconductor Physics Laboratory Co. Ltd.
Sep 21, 2002
11024
Semilab supplies a range of process control and measurement tools for the semiconductor, optoelectronics and photovoltaics industries worldwide: non-contact V-Q for dielectric characterization, plasma damage monitoring; SPV and uPCD for furnace contamination control, iron contamination detection, bulk wafer quality determination; TID Tool; a novel method for quantitative measurement of Cu in silicon; Bulk Microdefect Analyzer for monitoring and analysis of BMDs, DZ determination; DLTS for identification and concentration determination of impurities; non-contact resistivity determination; mapping and single point measurements; p/n conductivity type tester. Furthermore Semilab supplies a wide range of infrared inspection equipment for controlling mechanical stress in silicon, and inspection of defects and alignment of bonded wafers. Semilab also supplies metrology equipment for the thin film and flat panel display industries.
Primary Industry
Semiconductor
Primary Product Category
Equipment and Sub-Systems
Primary Product Sub Category
Metrology/Inspection
Keywords
Metrology, Process control
Website
Prielle Kornélia u. 4/A.
Budapest
H-1117