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October 27, 2021

SEMI EDA Standards Updates for Semiconductor Manufacturing Software Near Publication

During the last SEMI Standards Information & Control North America Technical Committee Chapter Meeting in July 2021, several ballots from the Equipment Automation Software volume, or the E Series, passed procedural review and are awaiting publication. Chief among them are ballots for the Equipment Data Acquisition (EDA) Standards, which use the Freeze concept to identify a specific set of SEMI Standards.

Currently Freeze 2, which uses HTTP/1.1 with SOAP/XML, is available, while Freeze 3, which will use HTTP/2 with gRPC, is under consideration. In preparation for Freeze 3, several standards from the EDA Standards Suite have been revised to support HTTP/2 with gRPC and Protocol Buffers technology.

Summary of Changes

E Series Table


The Advanced Backend Factory Integration Task Force passed a line-item revision to SEMI E5, Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II). The revision establishes a consistent way for implementers to report the number of attempts to send an ItemPart in order to improve the functionality of Stream 21 Item Transfer messages.

Software Vendor Testing Session

In 2022, the SEMI Standards Diagnostic Data Acquisition (DDA) Task Force is planning to offer in-person and remote software vendor test sessions. EDA software implementers will work with peers to identify and resolve any interoperability issues. To learn more or to participate in the tests, please contact DDA Task Force co-leaders Albert Fuchigami (albert.fuchigami@peergroup.com) or Brian Rubow (brian.rubow@cimetrix.com).
 

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More Details on Information and Control Standards

At the 2021 SEMI Global Smart Manufacturing Conference, Alan Weber of Cimetrix by PDF Solutions presented a thorough overview of the SEMI Standards in the E Series – Automation Standards for Hardware and Software. Learn more about the standards by registering for on-demand access (available through December 22) to the conference.

To purchase SEMI Standards Licenses (required to use, reference or install), visit the SEMI Store for descriptions, details, and related documents. Learn about SEMIViews, the all-access, 24/7 subscription option for licensing, or request a free 30-day SEMIViews trial.

Get Involved

SEMI Standards development activities take place throughout the year in all major manufacturing regions. You and your company can influence these critical industry issues by becoming a SEMI Standards Program Member

Michelle Sun is a coordinator for SEMI International Standards, supporting the operations of the Information and Control, Automated Test Equipment, HB-LED, Metrics, Traceability Committees and Task Forces.