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September 21, 2021

SEMI PFAS Working Group Survey – Requesting Your Feedback on U.S. EPA PFAS Low Volume Exemption Stewardship Program

In response to the PFAS Low Volume Exemption (LVE) Stewardship Program (for perfluoroalkyl and polyfluoroalkyl substances) recently established by the U.S. Environmental Protection Agency (USEPA), the SEMI PFAS Working Group (WG) is focused on identifying strategies that minimize supply chain risks and impacts to downstream users and advocating that USEPA allow existing PFAS LVEs. As part of this effort, the WG is asking the industry’s input through a survey that centers on the use of PFAS LVEs as they pertain to the scope of the USEPA Stewardship Program. Survey feedback will greatly assist the WG in developing an industry strategy to minimize supply chain disruption.

Complete the survey.

Survey Pull QuoteThe survey takes only a few minutes to fill out and is completely anonymous – no individual company or individual information is being requested. All PFAS LVE holders are strongly encouraged to participate in the survey. The deadline for completing the survey is Tuesday, Sept. 27th at 5:00pm Pacific Time. 

The USEPA Stewardship Program encourages all PFAS LVE holders to voluntarily withdraw their LVEs or submit Pre-Manufacturing Notice (PMN) applications in order to continue to manufacture and/or import the substances in the U.S. Any change in USEPA policies to existing LVE PFAS substances could subject the semiconductor industry – particularly suppliers of chemicals for photolithography – to burdensome and costly compliance and testing requirements.

Participation in SEMI EHS WGs is open to all SEMI members. To join the PFAS WG or any other EHS WG, please email ehs@semi.org.

Robert Bonderer is Senior EHS Manager at JSR North American Headquarters.