Types of PFAS Regulations
There are many PFAS regulations in effect and in development and trends are arising in the topics the regulations target. Some regulations target one topic and others cover several topics. The topics include:
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PFAS in waterways and drinking water. |
PFAS in consumer cleaning products |
PFAS in consumer medical products (e.g. dental floss) |
PFAS in farmland. |
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PFAS in food packaging |
PFAS in fire-fighting foams. |
PFAS in pesticides. |
PFAS in animal health products. |
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PFAS in textiles. |
PFAS in cosmetics |
PFAS in bottled-water bottles. |
PFAS in industrial food preparation equipment. |
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PFAS in general products |
PFAS in ski wax |
PFAS in cookware |
PFAS in baby products |
There are also regulations which focus subsets of the larger PFAS family. These include regulations restricting PFOA, PFOS, PFHxA, Fluorinated Greenhouse Gases, and many others.
PFAS Regulation Examples
Listed here are a few of the PFAS regulations that the SEMI PFAS working group has been monitoring, and in some cases, seeking amendments through advocacy.
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Status |
Summary |
Link |
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Proposed |
1. An EU REACH Annex XVII restriction on the general use of PFAS. As currently proposed, it would likely shut down the semiconductor industry in the EU (and many other industries). |
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Proposed |
2. A new US TSCA PFAS reporting and recordkeeping regulation. As currently drafted it requires a company to look back to 2011 and reporting on any PFAS substances manufactured (including import) between then and now. |
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In Effect |
3. A US Maine statue (LD1503) requiring the reporting of products containing PFAS and prohibiting such product from 2030 unless the Department of Environmental Protection (DEP) deems it to be a “currently unavoidable use”. Regulations for the statute have been drafted but not released. The statute has generated a lot of concern and there are several amending bills in process to change the statute. |
LINK. |
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Proposed |
4. A US Minnesota statute () requiring the reporting of products containing PFAS |
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Proposed |
5. A US Massachusetts statute (S.1356) requiring the reporting of products containing PFAS |
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Proposed |
6. A US New York statute (A03571) requiring the reporting of products containing PFAS |
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In Effect |
7. An EU REACH Annex XVII restriction (entry 68) on the general use of a PFAS subset - perfluorocarboxylic acids containing 9 to 14 carbon atoms in the chain (C9-C14 PFCAs), their salts and C9-C14 PFCA-related substances. Such substances could be present as additives or process residues in polymers or as constituents of semiconductor process chemicals. |
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Proposed |
8. An EU REACH Annex XVII restriction on the general use of a PFAS subset - perfluorohexane sulfonic acid (PFHxS) including its salts and related substances. |
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Proposed |
9. An EU REACH Annex XVII restriction on the general use of a PFAS subset - undecafluorohexanoic acid (PFHxA), its salts and related substances. Such substances could be present as additives or process residues in polymers or as constituents of semiconductor process chemicals. |
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In Effect |
10. Beginning as an EU REACH Annex XVII restriction but moved into the EU Persistent Organic Pollutants (POPs) regulation, a restriction on the general use of perfluorooctanoic acid (PFOA), its salts and PFOA-related compounds. Such substances could be present as additives or process residues in polymers or coatings. They are likely no longer present as constituents of semiconductor process chemicals. |
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In Effect |
11. A US TSCA Significant New Use Rule (SNUR) on general use of a PFAS subset - Long-Chain Perfluoroalkyl Carboxylate and Perfluoroalkyl Sulfonate Chemical Substances (LCPFAC). It is a list-based restriction which includes PFOA a several similar substances and has many use-case exemptions. |
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In Effect |
12. Beginning as an EU REACH Annex XVII restriction but moved into the EU Persistent Organic Pollutants (POPs) regulation, a restriction on the general use of Perfluorooctane sulfonic acid and its derivatives (PFOS). Such substances are likely no longer present as constituents of components or semiconductor process chemicals. |
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Proposed |
13. A US TSCA SNUR on PFAS listed as “Inactive” in the TSCA chemical inventory. |
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In Effect |
14. A Singapore PFOA restriction. “plastics” and “lubricants” are excepted, but not adhesives. Company case-specific exceptions can be granted after NEA review and approval. |
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Vetoed |
15. A US California statute (AB2247) requiring the reporting of products containing PFAS |
There are many other PFAS regulations related to drinking water, fire fighting foams, cosmetics, etc.
Regulations related to fluorinated greenhouse gases (Fgases or GHGs) and ozone depleting substances (ODSs) might also have PFAS in scope and so are a kind of PFAS regulation, but are not included in the above list.
Semiconductor manufacturing and related semiconductor chemical and equipment manufacturing facilities might also be subject to wastewater regulations which include consideration of PFAS.
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Please note: SEMI makes no warranties or representation to the accuracy or usefulness of the information contained on this webpage. Accuracy is solely the responsibility of the user. Users are cautioned to refer to other relevant literature of the subject matter herein. This information is subject to change without notice. This "explainer" was developed by members of the SEMI PFAS Working Group. Please send suggestions for improvement to ehs@semi.org