lithography

A change is underway in the manufacturing sector as the use of curvilinear shapes on photomasks grows, leading to the real possibility of curvilinear shapes in designs. It may just be the start of a revolution away from Manhattan or rectangular shapes to curvilinear shapes. Changing the physical...

This article is the fifth and final in a series highlighting the vital importance of SEMI Standards to commemorate the publication of the 1000th SEMI Standard in July 2019.  Find the entire series here.As we define industry standards for managing data in the fab and beyond, we are...

Materials innovation has always been vital to the semiconductor industry. In the past, it was high-κ gate dielectrics. Today, Cobalt is seen as a replacement for Tungsten in middle-of-line (MOL) contacts.What materials innovation will the future bring?A likely answer is Graphene, the wonder...